Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
cmp
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
cmp
sameAs
dbr:CMP
skos:broader
supplier
conventional technique
suitable process
process step
alternatively
complex process
application
company
example
means
method
place
procedure
process
program
s
service
source
structure
treatment
association
instruction
code
deal
plan
technology
case
function
part
sale
solution
step
time
tool
good deal
appropriate means
cmp
organization
technique
utility
apparatus
know technique
layer
meeting
manufacturing process
blood test
suitable method
suitable technique
conventional process
planarization process
conventional planarization technique
planarization technique
planarization
housing programme
material removal process
planarization method
planarization step
planarizing process
removal process
subsequent process
suitable planarization technique
has head
cmp
is
skos:broader
of
alumina
entity
source
transaction
file
cmp
semiconductor wafer
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Raw Data in:
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