Description
Metadata
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
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About:
deposition method
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
deposition method
skos:broader
factor
method
process
deposition method
has head
method
has pre modifier
deposition
is
skos:broader
of
evaporation
spray
ald
sputtering
vapor deposition
agent
metal
method
chemical vapor deposition cvd
electroplating
plasma
deposition method
cvd
printing
coating
chemical vapor deposition
vacuum deposition
plasma cvd
atomic layer deposition
pvd
thermal evaporation
chemical vapor
lpcvd
electroless plating
pecvd
chemical vapor deposition pecvd
physical vapor deposition pvd
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