Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
dry etching
Sponge
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
dry etching
sameAs
dbr:Dry_etching
skos:broader
variety of technique
suitable process
example
method
process
step
technique
etching
known method
etching method
processing step
known technique
suitable technique
known process
etching process
advance in specific semiconductor
suitable etching process
etching technique
suitable etching technique
has head
etching
has pre modifier
dry
is
skos:broader
of
selectivity
process
rie
etching
icp
plasma etching
reactive ion etching
reactive ion etch rie
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