Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
etching process
Sponge
Permalink
An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
etching process
skos:broader
suitable process
plasma process
art
example
method
procedure
process
present invention
suitable technique
different process
surface of the substrate
etching process
has head
process
has pre modifier
etching
is
skos:broader
of
process
etc
gas
chemical
rie
etching
layer
wet etching
etching process
plasma etching
dry etching
ion-milling
isotropic etching process
reactive-ion etching rie
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
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