Description
Metadata
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
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About:
physical vapor deposition pvd
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
physical vapor deposition pvd
skos:broader
other method
variety of technique
suitable process
convenient method
suitable deposition process
art
means
method
process
chemical vapor deposition cvd
various technique
deposition method
technique
apparatus
deposition
variety of method
deposition process
various method
variety of process
conventional method
known technique
suitable method
number of process
known process
convenient deposition method
known deposition method
vapor deposition technique
has head
pvd
has pre modifier
physical vapor deposition
is
skos:broader
of
sputtering
process
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