Description
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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
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About:
reactive ion etching
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An Entity of Type :
owl:Thing
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Attributes
Values
rdfs:label
reactive ion etching
sameAs
dbr:Reactive-ion_etching
skos:broader
art
means
method
procedure
process
treatment
technique
etching
suitable means
suitable technique
appropriate process
plasma etching
dry process
etched
dry etching
anisotropic etch
dry etch process
dry etch
anisotropic etching technique
dry etching method
etching technique
suitable anisotropic etching technique
has head
etching
has pre modifier
reactive ion
is
skos:broader
of
anisotropic etching
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