<http://webisa.webdatacommons.org/concept/_pecvd_>	<http://webisa.webdatacommons.org/ontology#hasHead>	"pecvd" .
<http://webisa.webdatacommons.org/concept/_pecvd_>	<http://www.w3.org/2000/01/rdf-schema#label>	"pecvd" .
<http://webisa.webdatacommons.org/concept/_pecvd_>	<http://www.w3.org/2002/07/owl#sameAs>	<http://dbpedia.org/resource/Plasma-enhanced_chemical_vapor_deposition> .