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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • depositing a second layer of gate spacer material over the exposed surface of the substrate, including the surface of the first gate spacers, said second layer of gate spacer material comprising TEOS or silicon nitride; and etching said second layer of gate spacer material, forming second gate spacers over the surface of the first gate spacers. 9.
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