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  • vice and its manufacturing methodUS650417428 mars 20007 janv. 2003Semiconductor Energy Laboratory Co., Ltd.Thin film transistor; crystal silicon thin film formed on a substrate such as a glass and quartz; containing a metal element which promotes crystallization of siliconUS652835828 mars 20004 mars 2003Semiconductor Energy Laboratory Co., Ltd.Semiconductor device and method for fabricating the sa
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