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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • ology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS70869279 Mar 20048 Aug 2006Micron Technology, Inc.Methods and systems for planarizing workpieces, e.g., microelectronic workpiecesUS709469521 Aug 200222 Aug 2006Micron Technology, Inc.Apparatus and method for conditioning a polishing pad used for mechanical and/or chem
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