Conductive material such as silver or copper can be incorporated into the source glass melt or introduced into the deposited film by thermal or photo-dissolution as discussed above. [0078] Similarly, metal doped oxides may be deposited from a synthesized source which contains all the necessary elements in the correct proportions (e.g., AgxO (x>2), CuxO (x>2), Ag/Cu???GeO2, Ag/Cu???As2O3, or Ag/Cu?