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  • oshiji HamataniOriginal AssigneeSemiconductor Energy Laboratory Co., Ltd.Export CitationBiBTeX, EndNote, RefManPatent Citations (100), Non-Patent Citations (44), Referenced by (9), Classifications (51), Legal Events (4) External Links: USPTO, USPTO Assignment, EspacenetThin film transistor; crystal silicon thin film formed on a substrate such as a glass and quartz; containing a metal element which
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