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  • For example, the lower electrode thin film 34 can be formed of a metal such as platinum (Pt), ruthenium (Ru), rhodium (Rh), palladium (Pd), iridium (Ir), gold (Au), silver (Ag), copper (Cu), nickel (Ni) or the like, alloy containing at least one of these metal as a principal component, conductive oxide having a perovskite structure such as SrRuO3, CaRuO3, SrVO3, SrCrO3, SrCoO3, LaNiO3, Nb doped Sr
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