About: isa:105568737   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • on chamber; a solid thin film is formed through chemical exchange or reaction with a second reactantUS200200488808 Aug 200125 Apr 2002Joo-Won LeeMethod of manufacturing a semiconductor device including metal contact and capacitorUS200200520973 May 20012 May 2002Park Young-HoonApparatus and method for depositing thin film on wafer using atomic layer depositionUS2002005523529 Oct 20019 May 2002Micro
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software