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  • No. 09/032,473, filed Feb. 26, 1998, entitled ???Lithographically Defined Microelectronic Contact Structures,??? the disclosure of which is incorporated herein by reference as though set forth in full. [0073]FIG. 6e illustrates a next step wherein layer 1230 of masking material, such as photoresist, is applied to both sides of substrate 1202 and patterned to have openings aligned with pits 1212 an
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