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  • However, the orifices 42 may also allow gas, especially purge gas, from the central passage 26 to enter the recesses 35. (As explained above, purge gas, which is typically either hydrogen or nitrogen gas, is typically continuously being introduced into the central passage 26 of the susceptor 20.) When the wafers W are in the recesses 35, expanding gas entering the orifices 42 from the central pass
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