For example, hydrocarbons such as CH4, C2 H6 and the like produce films of hydrogenated amorphous carbon known as DLC. Organometallic precursors containing Si, Al, Ti and the like such as Si(CH3)4, or Ti(OCH3)4 will produce metal-containing DLCs which are referred to as silicon or titanium containing DLCs such as Si-DLC. The family of DLCs can be made with fluorine containing precursors such as CF