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  • For example, carbides, nitrides, borides, oxides, and other materials can be synthesized and deposited on a substrate consistent with this invention, including various combinations, such as silicon carbide (SiC), titanium carbide (TiC), titanium carbon nitride (TiCN), titanium aluminum nitride (TiAlN), titanium boron nitride (TiBN), chromium nitride (CrN), tungsten carbide (WC), aluminum nitride (
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