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  • ormed on a substrate such as a glass and quartz; containing a metal element which promotes crystallization of siliconUS6528358Mar 28, 2000Mar 4, 2003Semiconductor Energy Laboratory Co., Ltd.Semiconductor device and method for fabricating the sameUS6528820Jan 17, 1997Mar 4, 2003Semiconductor Energy Laboratory Co., Ltd.Semiconductor device and method of fabricating sameUS6541315Feb 21, 2001Apr 1, 20
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