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  • To sum up, the advantages of the cantilever beam type MEMS of the present invention are described below. (1) Since the beam does not have quality and quantity, the MEMS is driven by only little power. (2) For the beam, a tiny displacement (nearly a length of wavelength) can affect the physic phenomenon and characteristics, such as wavelength, intensity and phase, etc, outstandingly. (3) The MEMS h
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