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  • or chemical-mechanical polishing of microfeature workpiecesUS6958001 *Dec 13, 2004Oct 25, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS7004817 *Aug 23, 2002Feb 28, 2006Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizin
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