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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • (4) Source.drain electrode 10, upper metal interconnection 23, and aluminum alloy film 53 can be formed of a conductive material other than aluminum such as an alloy of copper, gold, silver, silicide, refractory metal, doped polysilicon, titanium nitride (TiN) and titanium tungsten (TiW), and stacked layers thereof.
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