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  • onductor device and method for making sameUS650109717 Sep 199931 Dec 2002Semiconductor Energy Laboratory Co., Ltd.Electro-optical deviceUS650417428 Mar 20007 Jan 2003Semiconductor Energy Laboratory Co., Ltd.Thin film transistor; crystal silicon thin film formed on a substrate such as a glass and quartz; containing a metal element which promotes crystallization of siliconUS650706915 Mar 200014 Jan
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