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  • orp.Methods and systems for reticle inspection and defect review using aerial imagingUS7410737Apr 17, 2006Aug 12, 2008Applied Materials Israel, Ltd.System and method for process variation monitorUS7463352Jan 21, 2005Dec 9, 2008Applied Materials, Inc.Method and apparatus for article inspection including speckle reductionUS7466411 *May 25, 2006Dec 16, 2008Inphase Technologies, Inc.Replacement and al
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