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  • onMethod for low topography semiconductor device formationUS6624526 *1 Jun 200123 Sep 2003International Business Machines CorporationCompact SRAM cell incorporating refractory metal-silicon-nitrogen resistive elements and method for fabricatingUS676778519 Apr 200227 Jul 2004Micron Technology, Inc.Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuit
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