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  • Conductor layer 10 may be selected for example from the groups of materials known as noble metals (e.g. Au, Pt, Pd, Ir, Rh, etc.), alloys of noble metals with noble metals or non-noble metals, metals whose oxides are conducting (e.g. Ru, Mo, etc.), and electrically conducting oxides (e.g. RuO2, IrO2, Re2 O3, etc.), nitrides such as TiN or WN, electrically conductive, oxidation-resistant nitrides (
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