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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • o-device workpiecesUS689333230 Aug 200417 May 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS69326875 Feb 200423 Aug 2005Micron Technology, Inc.Planarizing pads for planarization of microelectronic substratesUS693592928 Apr 200330 Aug 2005Micron Technology, Inc.Polishing machines including un
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