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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • ond interlayer insulating film formed over the first interlayer insulating film and made of insulating material; a wiring groove formed in the second interlayer insulating film, passing over the conductive plug and exposing an upper surface of the conductive plug; and a wiring filled in the wiring groove and made of copper or alloy mainly consisting of copper, wherein a purity of copper in the con
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