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  • or planarization of microelectronic substratesUS7494697May 11, 2006Feb 24, 2009San Fang Chemical Industry Co., Ltd.Substrate of artificial leather including ultrafine fibers and methods for making the sameUS7520800Aug 16, 2004Apr 21, 2009Duescher Wayne ORaised island abrasive, lapping apparatus and method of useUS7547243Aug 17, 2007Jun 16, 2009Applied Materials, Inc.Method of making and apparatus
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