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  • However, as shown in FIG. 7-(B), if a temperature difference of about 150??? C. is generated such as in a case in which the upper surface is at 200??? C. and the lower surface is 500??? C., the lower insulating member 42 in this case is bent downwardly and warp is generated due to the difference in the thermal expansion between the upper surface and the lower surface of the lower insulating member
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