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  • For example, the double layer can be formed as follows; at first, selecting a copolymer, in the copolymers having the specific monomer of the layer (A), which is insoluble in one solvent wherein an alkali-soluble resin can be dissoluble in the solvent, such as methyl ethyl ketone, 1-methoxy-2-puropanol or the like; and coating the copolymer on the substrate using the other solvent which can dissol
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