od of forming sameUS5751031 *Apr 28, 1997May 12, 1998Micron Technology, Inc.Memory and other integrated circuitry having a conductive interconnect line pitch of less than 0.6 micronUS5886371 *Feb 21, 1997Mar 23, 1999Oki Electric Industry Co., Ltd.Integrated circuit with gate-array interconnections routed over memory areaUS5929509 *Dec 4, 1997Jul 27, 1999Taiwan Semiconductor Manufacturing Company,