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  • on hydrides represented by the general formula Sip Hq wherein p is an integer of 4 or more and l is an integer of 10 or more in a chamber housing the substrate and exerting light energy on the atmosphere to excite and decompose the silicon hydride compound; and b. forming the second layer containing silicon atoms and atoms of a Group III or Group V element by forming a gaseous atmosphere of (i) at
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