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  • For example, on pages 382 to 388 of ???Journal of Applied Physics??? 1991, vol. 70, No. 1, disclosed is a technology of obtaining a (111)-oriented ferroelectric thin film, in which metal thin films formed of metals such as platinum (Pt) and iridium (Ir) are deposited at 500??? C. to obtain a (111)-oriented metal thin film, and a ferroelectric thin film such as PZT is deposited on this metal thin f
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