FIG. 2a is a side view which is viewed in a direction of arrow A in FIG. 1, and FIG. 2b is a side view which is viewed in a direction of arrow B in FIG. 1. [0036] As shown in FIGS. 1, 2a and 2 b, the cleaning system 1 comprises a hoop carrying unit 2, a cleaning unit 3, a wafer conveying unit 4 and a chemical storing unit 5.