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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The polishing method using the metal-polishing liquid according to the present invention can be applied to any case, and is a method of supplying a polishing liquid to a polishing pad on a polishing platen, contacting this with a surface to be polished, and polishing the surface by relative movement between a surface to be polished and a polishing pad.
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