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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • As a result, the electrical conductor (e.g. metals such as aluminum or silicides such as silicon, polysilicon and titanium silicide) underlying the thinner oxide steps is exposed to the etching gas for a longer time thus producing more sputtering and/or removal of the electrical conductor at that location than the electrical conductor underlying the thicker oxide steps.
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