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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • It is a further object to provide for emplacement of the wafers or substrates into the pressure vessel submerged in a first process fluid or rinsing agent such as methanol, and to then directly displace the methanol with a second process fluid also in a liquid state, such as liquid carbon dioxide, this being connected within the pressure vessel and without disturbing the microstructures.
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