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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Materials processed by thin film equipment include metals, dielectrics and ceramics, aluminum, silicon, diamond like carbon (DLC), dopants, germanium, silicides, compound semiconductors (GaAs), nitrides TiN, and tungsten and other refractory metals.
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