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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Specifically, after cleaning the surfaces of the supporting substrate 100 and the insulating layer 116 by a method such as ultrasonic cleaning, the surface of the supporting substrate 100 and the surface of the insulating layer 116 are disposed to be in contact with each other.
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