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  • zing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assembliesUS699174024 May 200431 Jan 2006Micron Technology, Inc.Method for reducing removal forces for CMP padsUS700481723 Aug 200228 Feb 2006Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS7011566
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