Examples of the above silane compounds of which hydrogen atoms are partially or wholly substituted with halogen atoms may include halo-substituted chain or cyclic silane compounds represented by SiHr Hs Xt (X is halogen atom, r is an integer of 1 or more, preferably 1 to 10, more preferably 3 to 7, s+t=2r+2 or 2r) such as SiH3 F, SiH3 Cl, SiH3 Br, SiH3 I, etc.