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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • FIGS. 5A and 5B are schematic diagrams illustrating a state with a reticle held by the reticle holder, wherein FIG. 5A is a top view and FIG. 5B is a sectional view as seen in the direction of arrows A???A. FIG. 6 is an enlarged sectional view of the main part, when the reticle is held by the reticle holder.
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