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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A source gas may be silane (SiH4, Si2 H6, Si3 H8, Si4 H10) as amorphous silicon film forming material, H2 as base gas, rare gas, SiF4 for introducing fluorine, B2 H6, PH3, AsH3 for controlling a p or n conductivity, N2, NH3 for introducing nitrogen, N2 O, NO for introducing oxygen, hydrocarbon such as CH4, C2 H4 for introducing carbon or other gas known to contain atoms which can be introduced by
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