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  • NEG material 12 needs to be activated once under the high vacuum supplied by the small size turbomolecular pumps 13 at a pressure typically around 10-5 to 10-7 Torr), at high temperature (typically around 500??? to 700??? C., and for a certain duration (typically around 10 to 30 minutes) in order to be able to pump nitrogen, oxygen, carbon monoxide, water vapor, hydrogen and other impurities.
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