prov:value
| - As the di-substituted amino group represented by X in the general formula (1), an amino group substituted with two hydrocarbon groups or silyl groups is preferable, and examples of the hydrocarbon group include alkyl groups having1 to 10 carbon atoms such as a methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, isobutyl group, n-pentyl grou
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