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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • A process for forming a pattern which comprises(i) a step of coating a photoresist composition on a substrate, the photoresist composition comprising(a) a polymer having repeating units of the formula: ##STR36## wherein R1 is a hydrogen atom or a methyl group; R2 and R3 are independentl
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