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  • As the conductive material, any of metal elements such as aluminum (Al), titanium (Ti), silver (Ag), copper (Cu), gold (Au), platinum (Pt), nickel (Ni), palladium (Pd), tantalum (Ta), molybdenum (Mo), and the like, or an alloy material or a compound material including any of the above metal elements as its main component is used, and the conductive layer 2132 employs a single layer structure or a
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