prov:value
| - The atomic oxygen precursor may be generated by, for example, the dissociation of an oxygen containing precursor such as molecular oxygen (O2), ozone (O3), an nitrogen-oxygen compound (e.g., NO, NO2, N2O, etc.), a hydrogen-oxygen compound (e.g., H2O, H2O2, etc.), a carbon-oxygen compound (e.g., CO, CO2, etc.), as well as other oxygen containing precursors and combinations of precursors.
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