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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • where, ??k is a coefficient used for the EWMA-based filter, which is optionally a function of time and/or other processing events (the value of ??k may also be set to be a function of wafer number, distance from target or another type of process related event such as the beginning of a new lot or change in process condition); and Kn is a value called outlier coefficient, which can be set to a cert
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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